First Russian 350 nm lithography machine to be delivered to Mapper in December 2026

September 11, 2026 at 06:42 PM2 min

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The first serial Russian lithography machine capable of producing 350 nm chips is scheduled for delivery to Mapper in December 2026. The system was developed by Zelenograd Nanotechnology Center with Belarusian company Planar. The next stage is a 130 nm lithography machine with serial deliveries planned for 2027.

Key Facts

The first serial Russian lithography machine for 350 nm chips is scheduled for delivery to Mapper in December 2026.
The machine was developed by Zelenograd Nanotechnology Center (ZNTC) together with Belarusian company Planar.
The base version costs 392 million rubles excluding VAT, while the extended service version costs 561 million rubles.
The lithography machine processes up to 63 wafers of 150 mm diameter per hour, or 43 wafers of 200 mm diameter per hour.
Serial deliveries of a 130 nm lithography machine are planned for 2027.

Delivery Schedule

The first serial Russian lithography machine capable of producing 350 nm chips is planned for delivery to the customer in December 2026. According to CNews sources, the first unit will be received by Mapper, a company within the Shvabe holding of Rostec. The next serial machine is intended for Otraslevye Resheniya of the Element group. The production time for one lithography machine is about 18 months after an advance payment of half the cost.

Technical Specifications

The machine has a working field of 22 x 22 mm and supports wafers up to 200 mm in diameter. It uses a solid-state laser instead of a traditional mercury lamp, which should provide higher power and energy efficiency. The lithography machine achieves a throughput of up to 63 wafers of 150 mm diameter per hour. For 200 mm wafers, the machine can process up to 43 wafers per hour. The base version is priced at 392 million rubles excluding VAT, and the extended service version with a five-year warranty costs 561 million rubles.

Next-Generation 130 nm Lithography

The next stage is a serial domestic lithography machine with 130 nm resolution, also developed jointly with Planar. A prototype of the 130 nm machine was announced in August 2026, with development costs estimated at 5.7 billion rubles. Serial deliveries of lithography machines capable of producing 130 nm chips are planned for 2027.