China's DUV lithography stockpile prompts US calls for total export ban

October 2, 2026 at 05:00 PM1 min

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Chinese-owned fabs had acquired an estimated 343 immersion DUV lithography systems by early 2026, according to a report by the Centre for Technology & Statecraft. Former US officials urge Washington and its allies to shut down further exports of these tools. The study adds fresh data to the debate over a total blockade on immersion DUV tools bound for China.

Key Facts

Chinese-owned fabs had acquired an estimated 343 immersion DUV lithography systems by early 2026, according to the Centre for Technology & Statecraft.
The report was co-authored by former US export control official Nicholas Brown and Saif Khan, a former White House and commerce department technology policy adviser.
Chinese chipmakers have leaned heavily on immersion DUV systems, some models of which remain exempt from Western export bans, to produce sophisticated semiconductors.
Blocked from buying ASML's most advanced EUV lithography tools, Chinese semiconductor plants amassed hundreds of immersion lithography machines worth billions of dollars in recent years.

The Report

The Centre for Technology & Statecraft (CTS), a Washington research group established in August, published the study in late September. The report estimates that Chinese-owned fabs had acquired 343 immersion DUV lithography systems by early 2026. Co-authors Nicholas Brown and Saif Khan bring experience from US export control and technology policy roles.

Export Control Debate

Former US officials urge Washington and its allies to shut down further exports of immersion DUV tools to China. The study adds fresh data to the debate over whether Western allies should impose a total blockade on immersion DUV tools bound for China. Chinese chipmakers have relied on immersion DUV systems, some of which remain exempt from Western export bans, to produce advanced semiconductors.